Magnetic sensor device and magnetic sensor system

ABSTRACT

A magnetic sensor device includes a first chip including a first magnetic sensor, a second chip including a second magnetic sensor and a third magnetic sensor, and a support having a reference plane. The first magnetic sensor includes at least one first magnetic detection element, and detects a first component of an external magnetic field. The second magnetic sensor includes at least one second magnetic detection element, and detects a second component of the external magnetic field. The third magnetic sensor includes at least one third magnetic detection element, and detects a third component of the external magnetic field. The first chip and the second chip are mounted on the reference plane.

This application is a continuation of U.S. application Ser. No.17/959,392, filed Oct. 4, 2022, which is a continuation of U.S.application Ser. No. 17/218,430, filed on Mar. 31, 2021, the entiredisclosures of each of which are hereby incorporated by reference intheir entirety.

BACKGROUND

The technology relates to a magnetic sensor device that detectscomponents of an external magnetic field in three mutually differentdirections.

A magnetic sensor device for detecting components in a plurality ofdirections of an applied magnetic field has recently been used in avariety of applications. One example of the applications of the magneticsensor device includes a magnetic position detection device that detectsthe position of a magnet movable in three dimensions.

The magnetic position detection device includes, for example, a magneticsensor device, a magnet movable along a predetermined spherical surfacearound the magnetic sensor device, and a signal processing circuit. Themagnetic sensor device detects three components in three mutuallydifferent directions of a magnetic field generated by the magnet andapplied to the magnetic sensor device, and generates three detectionsignals corresponding to the three components. Based on the threedetection signals, the signal processing circuit generates positioninformation indicating the position of the magnet.

US 2009/0027048 A1 discloses a three-axial magnetic sensor having anX-axial sensor, a Y-axial sensor, and a Z-axial sensor formed in a chip.JP 2008-216181 A discloses a direction sensor in which a first magneticsensor, a second magnetic sensor, and a third magnetic sensor aredisposed on a flat substrate.

Incidentally, in use of the position detection device, unintendedexternal forces are applied, in some cases, to a substrate on which themagnetic sensor device is mounted. In this case, the substrate isdistorted, and a stress is applied to the magnetic sensor device. As aresult, there are occasions where a detection signal of the magneticsensor device generates an error.

As a method for reducing the effect of the stress applied to themagnetic sensor device, it is conceivable to divide a chip in whichmagnetic detection elements are formed, for the purpose of reducing thesize of individual chips. However, an increase in the number of chipscauses an increase in the number of processing steps, and thus mayincrease cost of the magnetic sensor device.

SUMMARY

An object of the technology is to provide a magnetic sensor device and amagnetic sensor system that can reduce the effect of an applied stress,while preventing a cost increase.

A magnetic sensor device according to the technology includes a firstchip including a first magnetic sensor, a second chip including a secondmagnetic sensor and a third magnetic sensor, and a support having areference plane. The first magnetic sensor includes at least one firstmagnetic detection element and detects a first component of an externalmagnetic field. The first component is a component of the externalmagnetic field in a first direction being a direction parallel to thereference plane. The second magnetic sensor includes at least one secondmagnetic detection element and detects a second component of theexternal magnetic field. The second component is a component of theexternal magnetic field in a second direction being a direction inclinedwith respect to each of the reference plane and a directionperpendicular to the reference plane. The third magnetic sensor includesat least one third magnetic detection element and detects a thirdcomponent of the external magnetic field. The third component is acomponent of the external magnetic field in a third direction beinganother direction inclined with respect to each of the reference planeand the direction perpendicular to the reference plane. The first chipand the second chip are mounted on the reference plane.

In the magnetic sensor device according to the technology, the at leastone first magnetic detection element may be disposed on a flat surfacethat is parallel to the reference plane. The at least one secondmagnetic detection element and the at least one third magnetic detectionelement may be disposed on an inclined surface that is inclined withrespect to the reference plane.

In the magnetic sensor device according to the technology, the firstchip and the second chip may be disposed with a predetermined gaptherebetween. In this case, the first chip and the second chip may bedisposed such that, when viewed from the direction perpendicular to thereference plane, a virtual straight line passing through the gap andhaving the same distance from the first chip and from the second chipdoes not cross the barycenter of the support.

In the magnetic sensor device according to the technology, the planarshape of the first chip viewed from the direction perpendicular to thereference plane may be smaller in size than the planar shape of thesecond chip viewed from the direction perpendicular to the referenceplane. In this case, the first chip may include a first elementarrangement area in which the at least one first magnetic detectionelement is disposed. The second chip may include a second elementarrangement area in which the at least one second magnetic detectionelement and the at least one third magnetic detection element aredisposed. The first element arrangement area may be ½ or less of thesecond element arrangement area in size.

In the magnetic sensor device according to the technology, each of thefirst chip and the second chip may have a planar shape long in adirection orthogonal to the direction of alignment of the first chip andthe second chip, when viewed from the direction perpendicular to thereference plane. In this case, each of the first chip and the secondchip may be disposed such that, when viewed from the directionperpendicular to the reference plane, a virtual straight line passingthrough the barycenter of the first chip and the barycenter of thesecond chip is in parallel with the direction of alignment of the firstchip and the second chip.

In the magnetic sensor device according to the technology, each of thefirst chip and the second chip may have a planar shape long in onedirection, when viewed from the direction perpendicular to the referenceplane. In this case, the first chip may have a plurality of first padsdisposed in the vicinity of both ends of the first chip in alongitudinal direction of the first chip. The second chip may have aplurality of second pads disposed in the vicinity of both ends of thesecond chip in a longitudinal direction of the second chip. The supportmay have a plurality of third pads disposed on the reference plane. Partof the plurality of third pads may be disposed on both sides of thefirst chip in the longitudinal direction of the first chip. Other partof the plurality of third pads may be disposed on both sides of thesecond chip in the longitudinal direction of the second chip.

In the magnetic sensor device according to the technology, the secondchip may have a planar shape long in one direction, when viewed from thedirection perpendicular to the reference plane. In this case, the secondchip may include a second element arrangement area in which the at leastone second magnetic detection element and the at least one thirdmagnetic detection element are disposed. When viewed from the directionperpendicular to the reference plane, the second element arrangementarea may have a planar shape long in a direction orthogonal to thelongitudinal direction of the planar shape of the second chip.

In the magnetic sensor device according to the technology, the dimensionof the first chip in the direction perpendicular to the reference planeand the dimension of the second chip in the direction perpendicular tothe reference plane may be the same.

In the magnetic sensor device according to the technology, the dimensionof the support in the direction perpendicular to the reference plane maybe larger than the dimension of the first chip in the directionperpendicular to the reference plane and the dimension of the secondchip in the direction perpendicular to the reference plane.

In the magnetic sensor device according to the technology, the firstmagnetic sensor may generate at least one first detection signal havinga correspondence with the first component. The second magnetic sensormay generate at least one second detection signal having acorrespondence with the second component. The third magnetic sensor maygenerate at least one third detection signal having a correspondencewith the third component. In this case, the support may include aprocessor. The processor may generate a first detection valuecorresponding to the first component based on the at least one firstdetection signal, and also generate a second detection valuecorresponding to a component of the external magnetic field in adirection parallel to the reference plane and orthogonal to the firstdirection and a third detection value corresponding to a component ofthe external magnetic field in the direction perpendicular to thereference plane based on the at least one second detection signal andthe at least one third detection signal.

A magnetic sensor system according to the technology includes themagnetic sensor device according to the technology, and a magnetic fieldgenerator that generates a predetermined magnetic field. The relativeposition of the magnetic field generator with respect to the magneticsensor device is changeable along a predetermined spherical surface.

In the magnetic sensor device and the magnetic sensor system accordingto the technology, the first chip includes the first magnetic sensor,and the second chip includes the second and third magnetic sensors. Thefirst chip and the second chip are mounted on the reference plane of thesupport. Therefore, according to the technology, it is possible toreduce the influence of an applied stress, while preventing a costincrease.

The other objects, features, and advantages of the technology will befully apparent with the following description. In the following, someexample embodiments and modification examples of the technology aredescribed in detail with reference to the accompanying drawings. Notethat the following description is directed to illustrative examples ofthe disclosure and not to be construed as limiting the technology.Factors including, without limitation, numerical values, shapes,materials, components, positions of the components, and how thecomponents are coupled to each other are illustrative only and not to beconstrued as limiting the technology. Further, elements in the followingexample embodiments which are not recited in a most-generic independentclaim of the disclosure are optional and may be provided on an as-neededbasis. The drawings are schematic and are not intended to be drawn toscale. Like elements are denoted with the same reference numerals toavoid redundant descriptions.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings are included to provide a furtherunderstanding of the disclosure and are incorporated in and constitute apart of this specification. The drawings illustrate example embodimentsand, together with the specification, serve to explain the principles ofthe technology.

FIG. 1 is a perspective view showing the schematic configuration of ajoint mechanism including a magnetic sensor system according to anembodiment of the technology.

FIG. 2 is a cross-sectional view showing the schematic configuration ofthe joint mechanism shown in FIG. 1 .

FIG. 3 is an explanatory view for describing a reference coordinatesystem in the magnetic sensor system according to the embodiment of thetechnology.

FIG. 4 is a perspective view showing a magnetic sensor device accordingto the embodiment of the technology.

FIG. 5 is a plan view showing the magnetic sensor device of theembodiment of the technology.

FIG. 6 is a side view showing the magnetic sensor device of theembodiment of the technology.

FIG. 7 is a functional block diagram showing a configuration of themagnetic sensor device according to the embodiment of the technology.

FIG. 8 is a circuit diagram showing an example of a circuitconfiguration of a first magnetic sensor of the embodiment of thetechnology.

FIG. 9 is a circuit diagram showing an example of a circuitconfiguration of a second magnetic sensor of the embodiment of thetechnology.

FIG. 10 is a circuit diagram showing an example of a circuitconfiguration of a third magnetic sensor of the embodiment of thetechnology.

FIG. 11 is a plan view showing a part of a first chip of the embodimentof the technology.

FIG. 12 is a sectional view showing a part of the first chip of theembodiment of the technology.

FIG. 13 is a plan view showing a part of a second chip of the embodimentof the technology.

FIG. 14 is a sectional view showing a part of the second chip of theembodiment of the technology.

FIG. 15 is a perspective view showing a magnetoresistive element of theembodiment of the technology.

FIG. 16 is an explanatory view for describing the shape and alignment ofthe first and second chips of the embodiment of the technology.

DETAILED DESCRIPTION

An embodiment of the technology will be described below in detail withreference to the drawings. Note that the following description isdirected to illustrative examples of the disclosure and not to beconstrued as limiting the technology. Factors including, withoutlimitation, numerical values, shapes, materials, components, positionsof the components, and how the components are coupled to each other areillustrative only and not to be construed as limiting the technology.Further, elements in the following example embodiments which are notrecited in a most-generic independent claim of the disclosure areoptional and may be provided on an as-needed basis. The drawings areschematic and are not intended to be drawn to scale. Like elements aredenoted with the same reference numerals to avoid redundantdescriptions. First, a joint mechanism 300 to which a magnetic sensorsystem 100 according to the embodiment of the technology is applied willbe described. The joint mechanism 300 is a mechanism including a joint.FIG. 1 is a perspective view showing a schematic configuration of thejoint mechanism 300. FIG. 2 is a cross-sectional view showing theschematic configuration of the joint mechanism 300. FIG. 3 is anexplanatory view for describing a reference coordinate system in themagnetic sensor system 100.

As shown in FIGS. 1 and 2 , the joint mechanism 300 includes a firstmember 310, a second member 320, and the magnetic sensor system 100.

The first member 310 includes a shaft portion 311 and a sphericalportion 312 coupled to one longitudinal end of the shaft portion 311.The spherical portion 312 includes a convex surface 312 a. Here, a firstspherical surface being a virtual spherical surface including the convexsurface 312 a is assumed. It can be said that the convex surface 312 ais constituted of a part of the first spherical surface. A portion ofthe first spherical surface that is not included in the convex surface312 a is a border portion between the shaft portion 311 and thespherical portion 312.

The second member 320 includes a shaft portion 321 and a receptorportion 322 coupled to one longitudinal end of the shaft portion 321.The receptor portion 322 includes a concave surface 322 a. Here, asecond spherical surface being a virtual spherical surface including theconcave surface 322 a is assumed. It can be said that the concavesurface 322 a is constituted of a part of the second spherical surface.The concave surface 322 a may be constituted of one half or almost onehalf of the second spherical surface.

With the spherical portion 312 fitted into the receptor portion 322, thefirst member 310 and the second member 320 are coupled to each othersuch that their positional relationship is changeable. The secondspherical surface has a radius slightly greater than or equal to that ofthe first spherical surface. The convex surface 312 a and the concavesurface 322 a may be in contact with each other, or opposed to eachother with a lubricant therebetween. The center of the second sphericalsurface coincides or almost coincides with that of the first sphericalsurface. The coupling portion between the first and second members 310and 320 is the joint. In the present example embodiment, the joint is aball-and-socket joint.

The magnetic sensor system 100 includes a magnetic sensor device 1 and amagnetic field generator 101. The magnetic field generator 101 is ableto change its relative position with respect to the magnetic sensordevice 1 along a predetermined spherical surface. The magnetic sensorsystem 100 is a device for detecting the relative position of themagnetic field generator 101 with respect to the magnetic sensor device1.

The magnetic field generator 101 generates a predetermined magneticfield. An example of the magnetic field generator 101 is a magnet. Themagnetic sensor device 1 generates a first detection value, a seconddetection value and a third detection value that have correspondenceswith components in three mutually different directions of a magneticfield at a reference position. The reference position will be describedin detail later.

As shown in FIGS. 1 and 2 , the magnetic field generator 101 is embeddedin the receptor portion 322 so as not to protrude from the concavesurface 322 a. The magnetic sensor device 1 is located inside thespherical portion 312. Hereinafter, the position of the center of thefirst spherical surface will be referred to as a reference position. Themagnetic sensor device 1 is configured to detect a magnetic field at thereference position.

Hereinafter, a magnetic field that is a portion of the magnetic fieldgenerated by the magnetic field generator 101 and that is at thereference position will be referred to as a target magnetic field. Forexample, the direction of the target magnetic field is parallel to avirtual straight line passing through the reference position and themagnetic field generator 101. In the example shown in FIG. 2 , themagnetic field generator 101 is a magnet having an N pole and an S polearranged along the foregoing virtual straight line. The S pole islocated closer to the reference position than the N pole is. Theplurality of arrowed broken lines in FIG. 2 represent magnetic lines offorce corresponding to the magnetic field generated by the magneticfield generator 101

The joint mechanism 300 shown in FIGS. 1 and 2 is able to change therelative position of the second member 320 with respect to the firstmember 310, with the spherical portion 312 fitted into the receptorportion 322. This allows the magnetic field generator 101 to be able tochange its relative position with respect to the magnetic sensor device1 along the foregoing predetermined spherical surface. In the presentexample embodiment, the relative position of the magnetic fieldgenerator 101 with respect to the magnetic sensor device 1 isrepresented by the position of a point closest to the reference positionon the magnetic field generator 101. The center of the predeterminedspherical surface coincides or almost coincides with the center of thefirst spherical surface. The predetermined spherical surface has aradius greater than or equal to that of the first spherical surface. Theradius of the predetermined spherical surface may coincide with that ofthe first spherical surface or that of the second spherical surface.

Now, a description will be given of a reference coordinate system in thepresent example embodiment with reference to FIG. 3 . The referencecoordinate system is an orthogonal coordinate system that is set withreference to the magnetic sensor device 1 and defined by three axes forexpressing the values of the first to third detection signals. An Xdirection, a Y direction, and a Z direction are defined in the referencecoordinate system. As shown in FIG. 3 , the X, Y, and Z directions areorthogonal to each other. The opposite directions to the X, Y, and Zdirections will be expressed as −X, −Y, and −Z directions, respectively.

As described above, the magnetic sensor device 1 generates the first,second, and third detection values having correspondences with thecomponents in three mutually different directions of the magnetic fieldat the reference position. In the present example embodiment,specifically, the three mutually different directions are a directionparallel to the X direction, a direction parallel to the Y direction,and a direction parallel to the Z direction. The three axes defining thereference coordinate system are an axis parallel to the X direction, anaxis parallel to the Y direction, and an axis parallel to the Zdirection.

The position of the magnetic sensor device 1 in the reference coordinatesystem remains unchanged. As the relative position of the magnetic fieldgenerator 101 with respect to the magnetic sensor device 1 changes, theposition of the magnetic field generator 101 in the reference coordinatesystem changes along the foregoing predetermined spherical surface. InFIG. 3 , the reference numeral 102 designates the predeterminedspherical surface. The position of the magnetic field generator 101 inthe reference coordinate system indicates the relative position of themagnetic field generator 101 with respect to the magnetic sensor device1. Hereinafter, the position of the magnetic field generator 101 in thereference coordinate system will be simply referred to as the positionof the magnetic field generator 101.

In the joint mechanism 300 including the magnetic sensor system 100, themagnetic sensor system 100 detects the relative position of the magneticfield generator 101 with respect to the magnetic sensor device 1,thereby enabling detection of the relative position of the second member320 with respect to the first member 310. The joint mechanism 300 may beused for robots, industrial equipment, medical equipment, amusementequipment, etc.

The magnetic sensor system 100 is applicable not only to the jointmechanism 300 but also to joysticks and trackballs.

A joystick includes, for example, a lever and a supporter that swingablysupports the lever. In the case of applying the magnetic sensor system100 to the joystick, for example, the magnetic field generator 101 isprovided inside the supporter and the magnetic sensor device 1 isprovided inside the lever so that the relative position of the magneticfield generator 101 with respect to the magnetic sensor device 1 changesalong a predetermined spherical surface as the lever swings.

A trackball includes, for example, a ball and a supporter that rotatablysupports the ball. In the case of applying the magnetic sensor system100 to the trackball, for example, the magnetic field generator 101 isprovided inside the supporter and the magnetic sensor device 1 isprovided inside the ball so that the relative position of the magneticfield generator 101 with respect to the magnetic sensor device 1 changesalong a predetermined spherical surface as the ball rotates.

Next, the configuration of the magnetic sensor device 1 will bedescribed with reference to FIGS. 4 to 7 . FIG. 4 is a perspective viewshowing the magnetic sensor device 1. FIG. 5 is a plan view showing themagnetic sensor device 1. FIG. 6 is a side view showing the magneticsensor device 1. FIG. 7 is a functional block diagram showing theconfiguration of the magnetic sensor device 1.

The magnetic sensor device 1 includes a first chip 2 including a firstmagnetic sensor 10, a second chip 3 including a second magnetic sensor20 and a third magnetic sensor 30, and a support 4. Each of the firstchip 2, the second chip 3, and the support 4 has a rectangularparallelepiped shape. The support 4 has a reference plane 4 a being atop surface, a bottom surface 4 b positioned opposite from the referenceplane 4 a, and four side surfaces connecting between the reference plane4 a and the bottom surface 4 b.

Now, a relationship of the components of the magnetic sensor device 1with the reference coordinate system will be described with reference toFIGS. 4 to 6 . As described above, the X, Y, Z, −X, −Y, and −Zdirections are defined in the reference coordinate system. The X and Ydirections are parallel to the reference plane 4 a of the support 4. TheZ direction is perpendicular to the reference plane 4 a of the support4, and directed from the bottom surface 4 b to the reference plane 4 aof the support 4. Hereinafter, the term “above” refers to positionslocated forward of a reference position in the Z direction, and “below”refers to positions opposite from the “above” positions with respect tothe reference position. For each component of the magnetic sensor device1, the term “top surface” refers to a surface of the component lying atthe end thereof in the Z direction, and “bottom surface” refers to asurface of the component lying at the end thereof in the −Z direction.

The first chip 2 has a top surface 2 a and a bottom surface 2 bpositioned opposite to each other, and four side surfaces connectingbetween the top surface 2 a and the bottom surface 2 b. The second chip3 has a top surface 3 a and a bottom surface 3 b positioned opposite toeach other, and four side surfaces connecting between the top surface 3a and the bottom surface 3 b.

The first chip 2 is mounted on the reference plane 4 a in a posture suchthat the bottom surface 2 b faces the reference plane 4 a of the support4. The second chip 3 is mounted on the reference plane 4 a in a posturesuch that the bottom surface 3 b faces the reference plane 4 a of thesupport 4. The first chip 2 and the second chip 3 are bonded to thesupport 4 with, for example, adhesives 6 and 7, respectively.

In the present example embodiment, the magnetic sensor device 1 ismounted on a printed board 5. To be more specific, the magnetic sensordevice 1 is mounted on a top surface of the printed board 5 in a posturesuch that the bottom surface 4 b of the support 4 faces the top surfaceof the printed board 5. The support 4 is bonded to the printed board 5with, for example, an adhesive 8. The magnetic sensor device 1 mountedon the printed board 5 is sealed with a not-shown molded resin.

The first chip 2 has a plurality of first pads (electrode pads) 21disposed on the top surface 2 a. The second chip 3 has a plurality ofsecond pads (electrode pads) 31 disposed on the top surface 3 a. Thesupport 4 has a plurality of third pads (electrode pads) 41 disposed onthe reference plane 4 a. Although not shown, in the magnetic sensordevice 1, among the plurality of first pads 21, the plurality of secondpads 31, and the plurality of third pads 41, corresponding pairs areconnected with bonding wires.

The support 4 includes a processor 40 configured to process a pluralityof detection signals generated by the first to third magnetic sensors10, 20, and 30. For example, the processor 40 is constructed of anapplication-specific integrated circuit (ASIC). The first to thirdmagnetic sensors 10, 20, and 30 are connected to the processor 40through pads 21, 31, and 41 and the plurality of bonding wires.

A dimension in a direction perpendicular to the reference plane 4 a isreferred to as thickness. As shown in FIG. 6 , the thickness of thefirst chip 2 and the thickness of the second chip 3 are the same. Thethickness of the support 4 is greater than the thickness of the firstchip 2 and the thickness of the second chip 3.

Next, referring to FIGS. 8 to 14 , an example of the configuration ofthe first to third magnetic sensors 10, 20, and 30 will be described.FIG. 8 is a circuit diagram showing an example of the circuitconfiguration of the first magnetic sensor 10. FIG. 9 is a circuitdiagram showing an example of the circuit configuration of the secondmagnetic sensor 20. FIG. 10 is a circuit diagram showing the circuitconfiguration of the third magnetic sensor 30. FIG. 11 is a plan viewshowing a part of the first chip 2. FIG. 12 is a sectional view showinga part of the first chip 2. FIG. 13 is a plan view showing a part of thesecond chip 3. FIG. 14 is a sectional view showing a part of the secondchip 3.

Here, a first direction, a second direction, and a third direction aredefined as follows. The first direction is a direction parallel to thereference plane 4 a. The second direction is a direction inclined withrespect to each of the reference plane 4 a and a direction (Z direction)perpendicular to the reference plane 4 a. The third direction is anotherdirection inclined with respect to each of the reference plane 4 a andthe direction (Z direction) perpendicular to the reference plane 4 a.More specifically, in the present example embodiment, the firstdirection is a direction parallel to the X direction. The seconddirection is orthogonal to the first direction. The third direction isorthogonal to the first direction too.

As shown in FIG. 14 , a U direction and a V direction are defined asfollows. The U direction is a direction rotated from the Y direction tothe −Z direction. The V direction is a direction rotated from the Ydirection to the Z direction. More specifically, in the present exampleembodiment, the U direction is set to a direction rotated from the Ydirection to the −Z direction by a, and the V direction is set to adirection rotated from the Y direction to the Z direction by a. Notethat a is an angle greater than 0° and smaller than 90°. −U directionrefers to a direction opposite to the U direction, and −V directionrefers to a direction opposite to the V direction.

The second direction is a direction parallel to the U direction. Thethird direction is a direction parallel to the V direction.

The first magnetic sensor 10 includes at least one first magneticdetection element, and detects a first component of an external magneticfield. The first component is a component in the first direction(direction parallel to the X direction) of the external magnetic field.The first magnetic sensor 10 generates at least one first detectionsignal having a correspondence with the first component. The externalmagnetic field contains the aforementioned target magnetic field.

The second magnetic sensor 20 includes at least one second magneticdetection element, and detects a second component of an externalmagnetic field. The second component is a component in the seconddirection (direction parallel to the U direction) of the externalmagnetic field. The second magnetic sensor 20 generates at least onesecond detection signal having a correspondence with the secondcomponent.

The third magnetic sensor 30 includes at least one third magneticdetection element, and detects a third component of an external magneticfield. The third component is a component in the third direction(direction parallel to the V direction) of the external magnetic field.The third magnetic sensor 30 generates at least one third detectionsignal having a correspondence with the third component.

In the example shown in FIG. 8 , the first magnetic sensor 10 includes apower port V1, a ground port G1, signal output ports E11 and E12, andfour resistor sections R11, R12, R13, and R14. The resistor section R11is disposed between the power port V1 and the signal output port E11.The resistor section R12 is disposed between the signal output port E11and the ground port G1 The resistor section R13 is disposed between thepower port V1 and the signal output port E12. The resistor section R14is disposed between the signal output port E12 and the ground port G1.Each of the resistor sections R11, R12, R13, and R14 includes at leastone first magnetic detection element.

In the example shown in FIG. 9 , the second magnetic sensor 20 includesa power port V2, a ground port G2, signal output ports E21 and E22, andfour resistor sections R21, R22, R23, and R24. The resistor section R21is disposed between the power port V2 and the signal output port E21.The resistor section R22 is disposed between the signal output port E21and the ground port G2. The resistor section R23 is disposed between thepower port V2 and the signal output port E22. The resistor section R24is disposed between the signal output port E22 and the ground port G2.Each of the resistor sections R21, R22, R23, and R24 includes at leastone second magnetic detection element.

In the example shown in FIG. 10 , the third magnetic sensor 30 includesa power port V3, a ground port G3, signal output ports E31 and E32, andfour resistor sections R31, R32, R33, and R34. The resistor section R31is disposed between the power port V3 and the signal output port E31.The resistor section R32 is disposed between the signal output port E31and the ground port G3. The resistor section R33 is disposed between thepower port V3 and the signal output port E32. The resistor section R34is disposed between the signal output port E32 and the ground port G3.Each of the resistor sections R31, R32, R33, and R34 includes at leastone third magnetic detection element.

In the present example embodiment, the magnetic detection elementsincluded in the first to third magnetic sensors 10, 20, and 30 aremagnetoresistive elements. The magnetoresistive element is hereinafterabbreviated as MR element. The first magnetic sensor 10 includes aplurality of first MR elements 50A, as the at least one first magneticdetection element. The second magnetic sensor 20 includes a plurality ofsecond MR elements 50B, as the at least one second magnetic detectionelement. The third magnetic sensor 30 includes a plurality of third MRelements 50C, as the at least one third magnetic detection element.

The first magnetic sensor 10 further includes a plurality of lowerelectrodes 61A and a plurality of upper electrodes 62A configured toelectrically connect the plurality of first MR elements 50A. The secondmagnetic sensor 20 further includes a plurality of lower electrodes 61Band a plurality of upper electrodes 62B configured to electricallyconnect the plurality of second MR elements 50B. The third magneticsensor 30 further includes a plurality of lower electrodes 61C and aplurality of upper electrodes 62C configured to electrically connect theplurality of third MR elements 50C.

As shown in FIG. 12 , the first chip 2 includes a substrate 22 andinsulating layers 23, 24, 25, and 26. The insulating layer 23 isdisposed on the substrate 22. The plurality of lower electrodes 61A aredisposed on the insulating layer 23. The insulating layer 24 is disposedaround the plurality of lower electrodes 61A on the insulating layer 23.The plurality of first MR elements 50A are disposed on the plurality oflower electrodes 61A. The insulating layer 25 is disposed around theplurality of first MR elements 50A on the plurality of lower electrodes61A and the insulating layer 24. The plurality of upper electrodes 62Aare disposed on the plurality of first MR elements 50A and theinsulating layer 25. The insulating layer 26 is disposed around theplurality of upper electrodes 62A on the insulating layer 25. Note thatFIG. 11 omits the plurality of lower electrodes 61A, the plurality ofupper electrodes 62A, and the insulating layers 23 to 26.

In the state of mounting the first chip 2 on the reference plane 4 a ofthe support 4 (refer to FIGS. 4 to 6 ), a top surface of the substrate22 is in parallel with the reference plane 4 a. The insulating layer 23and the plurality of lower electrodes 61A are stacked on the top surfaceof the substrate 22. In the foregoing state, a top surface of each ofthe plurality of lower electrodes 61A is also in parallel with thereference plane 4 a. Thus, it can be said that, in the foregoing state,the plurality of first MR elements 50A are disposed on a flat surfaceparallel to the reference plane 4 a.

As shown in FIG. 14 , the second chip 3 includes a substrate 32 andinsulating layers 33, 34, 35, and 36. The insulating layer 33 isdisposed on the substrate 32. The plurality of lower electrodes 61B andthe plurality of lower electrodes 61C are disposed on the insulatinglayer 33. The insulating layer 34 is disposed around the plurality oflower electrodes 61B and the plurality of lower electrodes 61C on theinsulating layer 33. The plurality of second MR elements 50B aredisposed on the plurality of lower electrodes 61B. The plurality ofthird MR elements 50C are disposed on the plurality of lower electrodes61C. The insulating layer 35 is disposed around the plurality of secondMR elements 50B and the plurality of third MR elements 50C on theplurality of lower electrodes 61B, the plurality of lower electrodes61C, and the insulating layer 34. The plurality of upper electrodes 62Bare disposed on the plurality of second MR elements 50B and theinsulating layer 35. The plurality of upper electrodes 62C are disposedon the plurality of third MR elements 50C and the insulating layer 35.The insulating layer 36 is disposed around the plurality of upperelectrodes 62B and the plurality of upper electrodes 62C on theinsulating layer 35.

In the state of mounting the second chip 3 on the reference plane 4 a ofthe support 4 (refer to FIGS. 4 to 6 ), a top surface of the substrate32 is in parallel with the reference plane 4 a. The insulating layer 33has a plurality of groove sections 33 c. Each of the plurality of groovesections 33 c has an inclined surface 33 a and an inclined surface 33 bthat are inclined with respect to the top surface of the substrate 32.The plurality of lower electrodes 61B are disposed on each of theinclined surfaces 33 a of the plurality of groove sections 33 c. Theplurality of lower electrodes 61C are disposed on each of the inclinedsurfaces 33 b of the plurality of the groove sections 33 c. In theforegoing state, a top surface of each of the plurality of lowerelectrodes 61B and a top surface of each of the plurality of lowerelectrodes 61C are also inclined with respect to the reference plane 4a. Thus, it can be said that, in the foregoing state, the plurality ofsecond MR elements 50B and the plurality of third MR elements 50C aredisposed on inclined surfaces that are inclined with respect to thereference plane 4 a.

In the state of mounting the second chip 3 on the reference plane 4 a ofthe support 4 (refer to FIGS. 4 to 6 ), the inclined surfaces 33 a arein parallel with an XU plane, and the inclined surfaces 33 b are inparallel with an XV plane. Thus, it can be said that, in the foregoingstate, the plurality of second MR elements 50B are disposed on inclinedsurfaces parallel to the XU plane, and the plurality of third MRelements 50C are disposed on inclined surfaces parallel to the XV plane.

An optional MR element is indicated with a reference numeral 50 below.An optional lower electrode is indicated with a reference numeral 61. Anoptional upper electrode is indicated with a reference numeral 62. FIG.15 is a perspective view showing an MR element 50. In the presentexample embodiment, the MR element 50 is specifically a spin-valve MRelement. The MR element 50 includes a magnetization pinned layer 52having a magnetization in a fixed direction, a free layer 54 having amagnetization whose direction is variable depending on the direction ofan external magnetic field, and a gap layer 53 located between themagnetization pinned layer 52 and the free layer 54. The MR element 50may be a tunneling magnetoresistive (TMR) element or a giantmagnetoresistive (GMR) element. In the TMR element, the gap layer 53 isa tunnel barrier layer. In the GMR element, the gap layer 53 is anonmagnetic conductive layer. The resistance of the MR element 50changes with the angle that the magnetization direction of the freelayer 54 forms with respect to the magnetization direction of themagnetization pinned layer 52. The resistance of the MR element 50 is atits minimum value when the foregoing angle is 0°, and at its maximumvalue when the foregoing angle is 180°. In each MR element 50, the freelayer 54 has a shape anisotropy that sets the direction of themagnetization easy axis to be orthogonal to the magnetization directionof the magnetization pinned layer 52. As a method for setting themagnetization easy axis in a predetermined direction in the free layer54, a magnet configured to apply a bias magnetic field to the free layer54 can be used.

The MR element 50 further includes an antiferromagnetic layer 51. Theantiferromagnetic layer 51, the magnetization pinned layer 52, the gaplayer 53, and the free layer 54 are stacked in this order from the sideof a lower electrode 61. The antiferromagnetic layer 51 is electricallyconnected to the lower electrode 61. The antiferromagnetic layer 51 isformed of an antiferromagnetic material, and is in exchange couplingwith the magnetization pinned layer 52 to thereby pin the magnetizationdirection of the magnetization pinned layer 52. The magnetization pinnedlayer 52 may be a so-called self-pinned layer (Synthetic Ferri Pinnedlayer, SFP layer). The self-pinned layer has a stacked ferri structurein which a ferromagnetic layer, a nonmagnetic intermediate layer, and aferromagnetic layer are stacked, and the two ferromagnetic layers areantiferromagnetically coupled. In a case where the magnetization pinnedlayer 52 is the self-pinned layer, the antiferromagnetic layer 51 may beomitted.

Each upper electrode 62 is long and thin in shape, and is disposed ontwo lower electrodes 61 adjacent in a longitudinal direction of thelower electrode 61 to electrically connect adjacent two MR elements 50.It should be appreciated that the layers 51 to 54 of each MR element 50may be stacked in the reverse order to that shown in FIG. 15 .

In FIGS. 8 to 10 , solid arrows represent the magnetization directionsof the magnetization pinned layers 52 of the MR elements 50. In theexample shown in FIG. 8 , the magnetization direction of themagnetization pinned layer 52 of the first MR element 50A in each of theresistor sections R11 and R14 is the X direction. The magnetizationdirection of the magnetization pinned layer 52 of the first MR element50A in each of the resistor sections R12 and R13 is the −X direction. Asshown in FIG. 11 , the free layer 54 of the first MR element 50A has ashape anisotropy that sets the direction of the magnetization easy axisto be in parallel with the Y direction.

In the example shown in FIG. 9 , the magnetization direction of themagnetization pinned layer 52 of the second MR element 50B in each ofthe resistor sections R21 and R24 is the U direction. The magnetizationdirection of the magnetization pinned layer 52 of the second MR element50B in each of the resistor sections R22 and R23 is the −U direction. Asshown in FIG. 13 , the free layer 54 of the second MR element 50B has ashape anisotropy that sets the direction of the magnetization easy axisto be in parallel with the X direction.

In the example shown in FIG. 10 , the magnetization direction of themagnetization pinned layer 52 of the third MR element 50C in each of theresistor sections R31 and R34 is the V direction. The magnetizationdirection of the magnetization pinned layer 52 of the third MR element50C in each of the resistor sections R32 and R33 is the −V direction. Asshown in FIG. 13 , the free layer 54 of the third MR element 50C has ashape anisotropy that sets the direction of the magnetization easy axisto be in parallel with the X direction.

When the strength of a component of the external magnetic field in thefirst direction (direction in parallel with the X direction) i.e. thestrength of the first component changes, the resistance of each of theresistor sections R11 to R14 changes such that the resistances of theresistor sections R12 and R13 decrease with an increase in theresistances of the resistor sections R11 and R14, or the resistances ofthe resistor sections R12 and R13 increase with a decrease in theresistances of the resistor sections R11 and R14. Thereby the electricpotential of each of the signal output ports E11 and E12 changes. Thefirst magnetic sensor 10 generates a signal corresponding to theelectric potential of the signal output port E11 as a first detectionsignal S11, and generates a signal corresponding to the electricpotential of the signal output port E12 as a first detection signal S12.

When the strength of a component of the external magnetic field in thesecond direction (direction in parallel with the U direction) i.e. thestrength of the second component changes, the resistance of each of theresistor sections R21 to R24 changes such that the resistances of theresistor sections R22 and R23 decrease with an increase in theresistances of the resistor sections R21 and R24, or the resistances ofthe resistor sections R22 and R23 increase with a decrease in theresistances of the resistor sections R21 and R24. Thereby the electricpotential of each of the signal output ports E21 and E22 changes. Thesecond magnetic sensor 20 generates a signal corresponding to theelectric potential of the signal output port E21 as a second detectionsignal S21, and generates a signal corresponding to the electricpotential of the signal output port E22 as a second detection signalS22.

When the strength of a component of the external magnetic field in thethird direction (direction in parallel with the V direction) i.e. thestrength of the third component changes, the resistance of each of theresistor sections R31 to R34 changes such that the resistances of theresistor sections R32 and R33 decrease with an increase in theresistances of the resistor sections R31 and R34, or the resistances ofthe resistor sections R32 and R33 increase with a decrease in theresistances of the resistor sections R31 and R34. Thereby the electricpotential of each of the signal output ports E31 and E32 changes. Thethird magnetic sensor 30 generates a signal corresponding to theelectric potential of the signal output port E31 as a third detectionsignal S31, and generates a signal corresponding to the electricpotential of the signal output port E32 as a third detection signal S32.

Next, the operation of the processor 40 will be described. The processor40 generates a first detection value Sx corresponding to the firstcomponent (component in a direction parallel to the X direction) of theexternal magnetic field based on the first detection signals S11 andS12. In the present example embodiment, the processor 40 generates thefirst detection value Sx by an arithmetic including obtainment of thedifference S11-S12 between the first detection signal S11 and the firstdetection signal S12. The first detection value Sx may be the differenceS11-S12 itself, or may be a result of a predetermined correction, suchas again adjustment or an offset adjustment, made to the differenceS11-S12.

The processor 40 generates a second detection value and a thirddetection value based on the second detection signals S21 and S22 andthe third detection signals S31 and S32. The second detection value is adetection value corresponding to a component of the external magneticfield in a direction that is parallel to the reference plane 4 a andorthogonal to the first direction (direction parallel to the Xdirection). In the present example embodiment, as the second detectionvalue, the processor 40 generates a detection value corresponding to thecomponent of the external magnetic field in a direction parallel to theY direction. The third detection value is a detection valuecorresponding to a component of the external magnetic field in adirection perpendicular to the reference plane 4 a i.e. a component in adirection parallel to the Z direction. The second detection value isrepresented by a symbol Sy, and the third detection value is representedby a symbol Sz.

The processor 40 generates the second and third detection values Sy andSz as follows, for example. First, the processor 40 generates a value S2by an arithmetic including obtainment of the difference S21-S22 betweenthe second detection signal S21 and the second detection signal S22, andgenerates a value S3 by an arithmetic including obtainment of thedifference S31-S32 between the third detection signal S31 and the thirddetection signal S32. Next, the processor 40 calculates values S3 and S4using the following expressions (1) and (2).

S3=(S2+S1)/cos α  (1)

S4=(S2−S1)/sin α  (2)

The second detection value Sy may be the value S3 itself, or may be aresult of a predetermined correction, such as a gain adjustment or anoffset adjustment, made to the value S3. In the same manner, the thirddetection value Sz may be the value S4 in itself, or may be a result ofa predetermined correction, such as a gain adjustment or an offsetadjustment, made to the value S4.

Next, referring to FIG. 16 , the structural features of the magneticsensor device 1 will be described. FIG. 16 is an explanatory view fordescribing the shapes and alignment of the first and second chips 2 and3. As shown in FIG. 16 , the first chip 2 and the second chip 3 arealigned along the Y direction. When viewed from a directionperpendicular to the reference plane 4 a i.e. the Z direction, each ofthe first chip 2 and the second chip 3 has a planar shape long in adirection orthogonal to the direction (direction parallel to the Ydirection) of alignment of the first chip 2 and the second chip 3 i.e.in a direction parallel to the X direction. The planar shape of thefirst chip 2 when viewed from the Z direction may have the same size orsubstantially the same size as the planar shape of the second chip 3when viewed from the Z direction, or may be smaller than the planarshape of the second chip 3. In FIG. 16 , for the sake of convenience,the first chip 2 and the second chip 3 are shown such that the planarshape of the first chip 2 has the same size as the planar shape of thesecond chip 3. The first chip 2 and the second chip 3 are disposed witha predetermined gap G therebetween. The size of the gap G is preferablywithin a range of 5 to 400 μm.

In FIG. 16 , a line indicated with a reference numeral L1 represents avirtual straight line that passes through the gap G and has the samedistance from the first chip 2 and from the second chip 3. The virtualstraight line L1 represents the center of the gap G in the direction(direction parallel to the Y direction) of alignment of the first chip 2and the second chip 3. A point indicated with a reference numeral C4represents the barycenter of the support 4, when the support 4 is viewedfrom the Z direction. The first chip 2 and the second chip 3 are alignedsuch that, when viewed from the Z direction, the virtual straight lineL1 does not cross the barycenter C4.

In FIG. 16 , a point indicated with a reference numeral C2 representsthe barycenter of the first chip 2, when the first chip 2 is viewed fromthe Z direction. A point indicated with a reference numeral C3represents the barycenter of the second chip 3, when the second chip 3is viewed from the Z direction. A straight line indicated with areference numeral L2 represents a virtual straight line passing throughthe barycenter C2 and the barycenter C3. The first chip 2 and the secondchip 3 are disposed such that, when viewed from the Z direction, thevirtual straight line L2 is in parallel with the alignment direction ofthe first chip 2 and the second chip 3, i.e. the Y direction.

As shown in FIG. 16 , the first chip 2 includes a first elementarrangement area A2 in which the plurality of first MR elements 50A aredisposed. The second chip 3 includes a second element arrangement areaA3 in which the plurality of second MR elements 50B and the plurality ofthird MR elements 50C are disposed. More specifically, in the presentexample embodiment, when viewed from the Z direction, the second elementarrangement area A3 has a planar shape long in a direction orthogonal toa longitudinal direction of the planar shape of the second chip 3, thatis, in a direction parallel to the Y direction.

The first element arrangement area A2 may be the same or substantiallythe same in size as the second element arrangement area A3, or may besmaller in size than the second element arrangement area A3. Note that,in FIG. 16 , for the sake of convenience, the first element arrangementarea A2 is shown so as to have the same size as the second elementarrangement area A3. In a case where the first element arrangement areaA2 is smaller in size than the second element arrangement area A3, thefirst element arrangement area A2 may be ½ or less of the second elementarrangement area A3 in size, or may be less than ½ of the second elementarrangement area A3 in size. More specifically, in the present exampleembodiment, the plurality of first MR elements 50A are arranged in thesurface parallel to the reference plane 4 a, and the plurality of secondMR elements 50B and the plurality of third MR elements 50C are arrangedin the inclined surfaces that are inclined with respect to the referenceplane 4 a. The plurality of second MR elements 50B and the plurality ofthird MR elements 50C are used for generating the second and thirddetection values Sy and Sz corresponding to components of the externalmagnetic field in directions across the inclined surfaces, that is, thesecond detection value Sy corresponding to a component of the externalmagnetic field in a direction parallel to the Y direction and the thirddetection value Sz corresponding to a component of the external magneticfield in a direction parallel to the Z direction, respectively. On thecontrary, the plurality of first MR elements 50A are used for generatingthe first detection value Sx corresponding to a component of theexternal magnetic field in a direction parallel to the reference plane 4a, that is, a component of the external magnetic field in a directionparallel to the X direction. Accordingly, even if the number of theplurality of first MR elements 50A is reduced to less than ½ of thetotal number of the plurality of second MR elements 50B and theplurality of third MR elements 50C by reducing the first elementarrangement area A2 to less than ½ of the second element arrangementarea A3 in size, the ratio of change of the first detection value Sxrelative to change in the strength of the component of the externalmagnetic field in the direction parallel to the X direction can be madethe same or substantially the same as the ratio of change of the seconddetection value Sy relative to change in the strength of the componentof the external magnetic field in the direction parallel to the Ydirection and the ratio of change of the third detection value Szrelative to change in the strength of the component of the externalmagnetic field in the direction parallel to the Z direction.

As shown in FIG. 16 , the plurality of first pads 21 of the first chip 2are disposed in the vicinity of both ends of the first chip 2 in alongitudinal direction of the first chip 2 i.e. a direction parallel tothe X direction. The plurality of second pads 31 of the second chip 3are disposed in the vicinity of both ends of the second chip 3 in alongitudinal direction of the second chip 3 i.e. a direction parallel tothe X direction. Part of the plurality of third pads 41 of the support 4are disposed on both sides of the first chip 2 in the longitudinaldirection of the first chip 2. The other part of the plurality of thirdpads 41 of the support 4 are disposed on both sides of the second chip 3in the longitudinal direction of the second chip 3. Arrangement of theplurality of first pads 21, the plurality of second pads 31, and thethird pads 41 as described above facilitates connection with the bondingwires.

The function and effect of the magnetic sensor device 1 according to thepresent example embodiment will now be described. In the present exampleembodiment, the first chip 2 including the first magnetic sensor 10 andthe second chip 3 including the second magnetic sensor 20 and the thirdmagnetic sensor 30 are separated. The first chip 2 and the second chip 3are mounted on the reference plane 4 a of the support 4. Therefore,according to the present example embodiment, it is possible to reducethe effect of stresses applied to the magnetic sensor device 1, and morespecifically, errors of the detection signals S11, S12, S21, S22, S31,and S32 caused by the stresses.

Simulation results to investigate the stresses applied to the magneticsensor device 1 will be described below. First, a model of a practicalexample and a model of a comparative example used in simulation will bedescribed. The model of the practical example, which is a modelcorresponding to the magnetic sensor device 1 according to a presentexample embodiment, is a model of an assembly. This assembly, into whichthe magnetic sensor device 1 and the magnetic field generator 5 areintegrated, is fixed on a board for a bending test. In the model of thepractical example, the dimension of the first chip 2 in the X directionwas set to 670 μm, the dimension of the first chip 2 in the Y directionwas set to 320 μm, and the dimension of the first chip 2 in the Zdirection was set to 100 μm. The dimension of the second chip 3 in the Xdirection was set to 670 μm, the dimension of the second chip 3 in the Ydirection was set to 540 μm, and the dimension of the second chip 3 inthe Z direction was set to 100 μm. The gap G (refer to FIG. 16 ) was setto 90 μm.

The dimension of the support 4 in the X direction was set to 1560 μm,the dimension of the support 4 in the Y direction was set to 1290 μm,and the dimension of the support 4 in the Z direction was set to 150 μm.The dimension of the printed board 5 in the X direction was set to 1850μm, the dimension of the printed board 5 in the Y direction was set to1780 μm, and the dimension of the printed board 5 in the Z direction wasset to 190 μm.

The model of the comparative example, which is a model corresponding toa magnetic sensor device according to the comparative example, is amodel of an assembly. This assembly, into which the magnetic sensordevice according to the comparative example and the printed board 5 areintegrated, is fixed on a board for a bending test. The magnetic sensoraccording to the comparative example includes a single chip whichcontains the first to third magnetic sensors 10, 20, and 30, instead ofthe first and second chips 2 and 3 of the present example embodiment.The single chip includes a first element arrangement area A2 in which aplurality of first MR elements 50A of the first magnetic sensor 10 aredisposed, and a second element arrangement area A3 in which a pluralityof second MR elements 50B of the second magnetic sensor 20 and aplurality of third MR elements 50C of the third magnetic sensor 30 aredisposed. In the model of the comparative example, the dimension of thesingle chip in the X direction was set to 750 μm, the dimension of thesingle chip in the Y direction was set to 800 μm, and the dimension ofthe single chip in the Z direction was set to 100 μm.

Next, the simulation results will be described. In the simulation, astress applied to both the first element arrangement area A2 and thesecond element arrangement area A3, in a case where the board for thebending test was bent with respect to a predetermined axis that passesthrough the assembly and is parallel to a predetermined direction, wascalculated. In the simulation, the board for the bending test was bentin such a way that a strain amount of 1500 μST is generated in the boardfor the bending test. Here, a direction rotated by 450 from the Xdirection to the Y direction is referred to as a 45° direction. In themodel of the comparative example, a stress applied to each element ofthe first element arrangement area A2 and the second element arrangementarea A3 was calculated in each of cases where the foregoingpredetermined axis was an axis in a direction parallel to the Xdirection, an axis in a direction parallel to the Y direction, and anaxis in a direction parallel to the 45° direction. As to the model ofthe practical example, a stress applied to each of the first elementarrangement area A2 and the second element arrangement area A3 wascalculated in a case where the foregoing predetermined axis was an axisin a direction parallel to the 45° direction.

Next, the simulation results will be described. As to the model of thecomparative example, in a case where the foregoing predetermined axiswas the axis in the direction parallel to the X direction, the stressapplied to the first element arrangement area A2 was in a range of 2.0MPa, and the stress applied to the second element arrangement area A3was in a range of 4.7 MPa. In a case where the foregoing predeterminedaxis was the axis in the direction parallel to the Y direction, thestress applied to the first element arrangement area A2 was in a rangeof 2.8 MPa, and the stress applied to the second element arrangementarea A3 was in a range of 5.4 MPa. In a case where the foregoingpredetermined axis was the axis in the direction parallel to the 45°direction, the stress applied to the first element arrangement area A2was in a range of 9.2 MPa. and the stress applied to the second elementarrangement area A3 was in a range of 10.2 MPa. As understood from theseresults, the range of the stress applied to each of the first and secondelement arrangement areas A2 and A3 becomes its maximum, in a case wherethe board for the bending test is bent with respect to the axis in thedirection parallel to the 45° direction. Therefore, it is preferable toreduce the variations in stress applied to each of the first and secondelement arrangement areas A2 and A3 in this case.

In the model of the practical example, in a case where the foregoingpredetermined axis was an axis in a direction parallel to the 45°direction, the stress applied to the first element arrangement area A2was in a range of 6.7 MPa, and the stress applied to the second elementarrangement area A3 was in a range of 8.3 MPa. As understood from theseresults, according to the present example embodiment, it is possible toreduce variations in the stress applied to each of the first and secondelement arrangement areas A2 and A3 and hence reduce errors of thedetection signals S11, S12, S21, S22, S31, and S32 caused by thestresses, as compared to a case where the first to third magneticsensors 10, 20, and 30 are included in the single chip.

Note that, in a case where a stress is uniformly applied to each of thefirst and second element arrangement areas A2 and A3, combination of theMR elements 50 having different directions of magnetization of the freelayers 54 and different directions of magnetization of the magnetizationpinned layers 52 allows a reduction in errors of the detection signalsS11, S12, S21, S22, S31, and S32 caused by the stresses. However, inactual fact, a non-uniform stress is applied to each of the first andsecond element arrangement areas A2 and A3, due to various factors suchas how to apply a stress, the structures of the printed board and thesupport, or the like. Accordingly, there are cases where the errors ofthe detection signals S11, S12, S21, S22, S31, and S32 caused by thestresses cannot be reduced even with the foregoing method. On the otherhand, according to the present example embodiment, it is possible toreduce variations in the stress applied to each of the first and secondelement arrangement areas A2 and A3 and hence reduce errors of thedetection signals S11, S12, S21, S22, S31, and S32 caused by thestresses.

Other effects of the present example embodiment will be described below.In the present example embodiment, the second magnetic sensor 20 and thethird magnetic sensor 30 are provided on the second chip 3. Thereby,according to the present example embodiment, as compared to the case ofproviding the second magnetic sensor 20 and the third magnetic sensor 30in different chips, it is possible to reduce the number of chips.Therefore, according to the present example embodiment, it is possibleto reduce the influence of the stresses applied to the magnetic sensordevice 1, while preventing increase in cost of the magnetic sensordevice 1.

In the present example embodiment, the plurality of first MR elements50A of the first magnetic sensor 10 are disposed on the flat surfaceparallel to the reference plane 4 a, and the plurality of second MRelements 50B of the second magnetic sensor 20 and the plurality of thirdMR elements 50C of the third magnetic sensor 30 are disposed on theinclined surfaces that are inclined with respect to the reference plane4 a. In the case of providing the first to third magnetic sensors 10,20, and 30 on a single chip, just as in the case of the magnetic sensordevice according to the comparative example, the flat surface and theinclined surfaces have to be formed on a single substrate and theplurality of MR elements 50 have to be formed simultaneously on the flatsurface and the inclined surfaces. In this case, it is difficult toindividually adjust the characteristics of the MR elements 50 formed onthe flat surface and the characteristics of the MR elements 50 formed onthe inclined surfaces. This is because of difference in a depositionrate, a milling rate, and the thickness of a resist coating between theflat surface and the inclined surfaces. Due to the same reason, there isa problem of difference between a process condition to stably producethe MR elements 50 without any defect on the flat surface and a processcondition to stably produce the MR elements 50 without any defect on theinclined surfaces. If the MR elements 50 to be formed on the flatsurface and the MR elements 50 to be formed on the inclined surfaces areformed in separate steps, the number of steps increases.

According to the present example embodiment, the first MR elements 50Aformed on the flat surface and the second and third MR elements 50B and50C formed on the inclined surfaces are provided in different chips.Therefore, according to the present example embodiment, it is possibleto form the first MR elements 50A independently of the second and thirdMR elements 50B and 50C, and as a result, it is possible to prevent theoccurrence of the aforementioned various problems caused by forming theplurality of MR elements 50 simultaneously on the flat surface and theinclined surfaces.

In the present example embodiment, the plurality of first MR elements50A are formed on the flat surface. Therefore, it is possible toeliminate steps of forming the inclined surfaces in manufacturing thefirst chip 2, thus resulting in an increase in a yield rate of the firstchip 2 and a reduction in cost of the first chip 2.

In the present example embodiment, each of the first chip 2 and thesecond chip 3 has a planar shape long in a direction parallel to the Xdirection, when viewed from the Z direction. In a case where thereference plane 4 a of the support 4 is square or substantially squarein shape, forming each of the first chip 2 and the second chip 3 intothe aforementioned planar shape makes it possible to mount the firstchip 2 and the second chip 3 on the reference plane 4 a withoutunnecessary space. Thereby, according to the present example embodiment,it is possible to reduce wasted space that is unavailable to dispose achip or pad in the reference plane 4 a.

Incidentally, on the reference plane 4 a, if one or both of the firstchip 2 and the second chip 3 are disposed biasedly at an end of thereference plane 4 a, in a case where stresses are applied to the firstchip 2 and the second chip 3 from various directions, stresses appliedto one or both of the first element arrangement area A2 and the secondelement arrangement area A3 have large variations. However, according tothe present example embodiment, the first chip 2 and the second chip 3are disposed such that, when viewed from the Z direction, the virtualstraight line L2 passing through the barycenter C2 of the first chip 2and the barycenter C3 of the second chip 3 is in parallel with thedirection of alignment of the first chip 2 and the second chip 3 i.e.the Y direction. In other words, in the present example embodiment, thefirst chip 2 and the second chip 3 are aligned so as not to be biased toan end of the reference plane 4 a. Therefore, according to the presentexample embodiment, it is possible to reduce variations in the stressesto be applied to the first element arrangement area A2 and the secondelement arrangement area A3.

According to the present example embodiment, the plurality of first pads21 of the first chip 2 are disposed in the vicinity of the both ends ofthe first chip 2 in the longitudinal direction of the first chip 2.According to the present example embodiment, when compared to the caseof disposing the plurality of first pads 21 in the vicinity of the bothends of the first chip 2 in a transverse direction of the first chip 2,the aspect ratio (the ratio of a dimension in the short-length directionto a dimension in the long-length direction) of the first elementarrangement area A2 can be reduced, on condition that the planar shapeof the first chip 2 is unchanged. Therefore, according to the presentexample embodiment, ends of the first element arrangement area A2 can bedistant from ends of the reference plane 4 a, and as a result, it ispossible to reduce variations in the stress applied to the first elementarrangement area A2.

Similarly, according to the present example embodiment, the plurality ofsecond pads 31 of the second chip 3 are disposed in the vicinity of theboth ends of the second chip 3 in the longitudinal direction of thesecond chip 3. According to the present example embodiment, whencompared to the case of disposing the plurality of second pads 31 in thevicinity of both ends of the second chip 3 in a transverse direction ofthe second chip 3, the aspect ratio of the second element arrangementarea A3 can be reduced, on condition that the planar shape of the secondchip 3 is unchanged. Therefore, according to the present exampleembodiment, ends of the second element arrangement area A3 can bedistant from the ends of the reference plane 4 a, and as a result, it ispossible to reduce variations in the stress applied to the secondelement arrangement area A3.

Note that the technology is not limited to the foregoing embodiment butchangeable in various ways. For example, the magnetic sensor device andthe magnetic sensor system according to the technology are applicablenot only to the case of detecting the relative position of the magneticfield generator with respect to the magnetic sensor device but also tothe case of detecting the posture of the magnetic sensor device that isconfigured to be rotatable in a predetermined magnetic field.

The plurality of second MR elements 50B of the second magnetic sensor 20and the plurality of third MR elements 50C of the third magnetic sensor30 may be formed not only in the inclined surfaces 33 a and 33 b of eachof the plurality of groove sections 33 c but also in inclined surfacesof each of a plurality of protrusions protruding from the top surface ofthe insulating layer 33 in the Z direction.

The second chip 3 may include two magnetic sensors used for generatingdetection values corresponding to a component of the external magneticfield in a direction parallel to the Y direction and a component of theexternal magnetic field in a direction parallel to the Z direction,instead of the second and third magnetic sensors 20 and 30.

The first chip 2 may include a magnetic sensor used for generating adetection value corresponding to a component of the external magneticfield in a direction parallel to the Y direction, instead of the firstmagnetic sensor 10, and the second chip 3 may include two magneticsensors used for generating a detection value corresponding to acomponent of the external magnetic field in a direction parallel to theX direction and a detection value corresponding to a component of theexternal magnetic field in a direction parallel to the Z direction,instead of the second and third magnetic sensors 20 and 30.

Each of the first to third magnetic sensors 10, 20, and 30 may include ahalf bridge circuit constituted of two resistor sections, instead of aWheatstone bridge circuit constituted of four resistor sections. In thiscase, each of the first to third magnetic sensors 10, 20, and 30 maygenerate a detection signal that has a correspondence with a componentof the external magnetic field in a predetermined direction.

The magnetic detection element according to the technology may be anyelement as long as the element has the function of detecting a magneticfield. Accordingly, the magnetic detection element is not limited to thespin-valve MR element, but is a concept including an anisotropicmagnetoresistive element (AMR element), a Hall element (planar Hallelement and vertical Hall element), and the like.

The processor 40 may not be included in the support 4, and may not beintegrated with the first and second chips 2 and 3.

It is apparent that various aspects and modification examples of thetechnology can be implemented based on the above description.Accordingly, the technology can be implemented in modes other than thebest mode described above within the scope of claims and equivalentsthereto.

What is claimed is:
 1. A magnetic sensor device comprising: a first chipincluding a first magnetic sensor, a second chip including a secondmagnetic sensor and a third magnetic sensor, and a support having areference plane, wherein the first magnetic sensor includes at least onefirst magnetic detection element and detects a first component of anexternal magnetic field, and the first component is a component of theexternal magnetic field in a first direction, the second magnetic sensorincludes at least one second magnetic detection element and detects asecond component of the external magnetic field, and the secondcomponent is a component of the external magnetic field in a seconddirection, the third magnetic sensor includes at least one thirdmagnetic detection element and detects a third component of the externalmagnetic field, and the third component is a component of the externalmagnetic field in a third direction, the first direction, the seconddirection, and the third direction are mutually different directions,the first chip and the second chip are mounted on the reference plane,and each of the first chip and the second chip has a shape that islonger in a direction orthogonal to a direction of alignment of thefirst chip and the second chip, when viewed from the directionperpendicular to the reference plane.
 2. The magnetic sensor deviceaccording to claim 1, wherein the at least one first magnetic detectionelement is disposed on a flat surface that is parallel to the referenceplane, and the at least one second magnetic detection element and the atleast one third magnetic detection element are disposed on an inclinedsurface that is inclined with respect to the reference plane.
 3. Themagnetic sensor device according to claim 1, wherein the first chip andthe second chip are disposed with a predetermined gap therebetween. 4.The magnetic sensor device according to claim 3, wherein the first chipand the second chip are disposed such that, when viewed from thedirection perpendicular to the reference plane, a virtual straight linepassing through the gap and having the same distance from the first chipand from the second chip does not cross a barycenter of the support. 5.The magnetic sensor device according to claim 1, wherein the first chipviewed from the direction perpendicular to the reference plane issmaller in size than the second chip viewed from the directionperpendicular to the reference plane.
 6. The magnetic sensor deviceaccording to claim 5, wherein the first chip includes a first elementarrangement area in which the at least one first magnetic detectionelement is disposed, the second chip includes a second elementarrangement area in which the at least one second magnetic detectionelement and the at least one third magnetic detection element aredisposed, and the first element arrangement area is ⅔ or less of thesecond element arrangement area in size.
 7. A magnetic sensor devicecomprising: a first chip including a first magnetic sensor, a secondchip including a second magnetic sensor and a third magnetic sensor, anda support having a reference plane, wherein the first magnetic sensorincludes at least one first magnetic detection element and detects afirst component of an external magnetic field, and the first componentis a component of the external magnetic field in a first direction, thesecond magnetic sensor includes at least one second magnetic detectionelement and detects a second component of the external magnetic field,and the second component is a component of the external magnetic fieldin a second direction, the third magnetic sensor includes at least onethird magnetic detection element and detects a third component of theexternal magnetic field, and the third component is a component of theexternal magnetic field in a third direction, the first direction, thesecond direction, and the third direction are mutually differentdirections, the first chip and the second chip are mounted on thereference plane, each of the first chip and the second chip has a planarshape that is longer in a direction, when viewed from the directionperpendicular to the reference plane, the first chip has a plurality offirst pads disposed in a vicinity of both ends of the first chip in alongitudinal direction of the first chip, and the second chip has aplurality of second pads disposed in a vicinity of both ends of thesecond chip in a longitudinal direction of the second chip.
 8. Themagnetic sensor device according to claim 7, wherein the at least onefirst magnetic detection element is disposed on a flat surface that isparallel to the reference plane, and the at least one second magneticdetection element and the at least one third magnetic detection elementare disposed on an inclined surface that is inclined with respect to thereference plane.
 9. The magnetic sensor device according to claim 7,wherein the first chip and the second chip are disposed with apredetermined gap therebetween.
 10. The magnetic sensor device accordingto claim 9, wherein the first chip and the second chip are disposed suchthat, when viewed from the direction perpendicular to the referenceplane, a virtual straight line passing through the gap and having thesame distance from the first chip and from the second chip does notcross a barycenter of the support.
 11. The magnetic sensor deviceaccording to claim 7, wherein the first chip viewed from the directionperpendicular to the reference plane is smaller in size than the secondchip viewed from the direction perpendicular to the reference plane. 12.The magnetic sensor device according to claim 11, wherein the first chipincludes a first element arrangement area in which the at least onemagnetic detection element is disposed, the second chip includes asecond element arrangement area in which the at least one secondmagnetic detection element and the at least one third magnetic detectionelement are disposed, and the first element arrangement area is ⅔ orless of the second element arrangement area in size.
 13. The magneticsensor device according to claim 7, wherein the planar shape of each ofthe first chip and the second chip is long in a direction orthogonal toa direction of alignment of the first chip and the second chip.
 14. Themagnetic sensor device according to claim 7, wherein each of the firstchip and the second chip is disposed such that, when viewed from thedirection perpendicular to the reference plane, a virtual straight linepassing through a barycenter of the first chip and a barycenter of thesecond chip is in parallel with the direction of alignment of the firstchip and the second chip.
 15. The magnetic sensor device according toclaim 7, wherein the support has a plurality of third pads disposed onthe reference plane, part of the plurality of third pads is disposed onboth sides of the first chip in the longitudinal direction of the firstchip, and other part of the plurality of third pads is disposed on bothsides of the second chip in the longitudinal direction of the secondchip.
 16. The magnetic sensor device according to claim 7, wherein thesecond chip includes a second element arrangement area in which the atleast one second magnetic detection element and the at least one thirdmagnetic detection element are disposed, and when viewed from thedirection perpendicular to the reference plane, the second elementarrangement area has a planar shape long in a direction orthogonal to alongitudinal direction of the planar shape of the second chip.
 17. Themagnetic sensor device according to claim 7, wherein a dimension of thefirst chip in the direction perpendicular to the reference plane and adimension of the second chip in the direction perpendicular to thereference plane are the same.
 18. The magnetic sensor device accordingto claim 7, wherein a dimension of the support in the directionperpendicular to the reference plane is larger than a dimension of thefirst chip in the direction perpendicular to the reference plane and adimension of the second chip in the direction perpendicular to thereference plane.
 19. The magnetic sensor device according to claim 7,wherein the first magnetic sensor generates at least one first detectionsignal having a correspondence with the first component, the secondmagnetic sensor generates at least one second detection signal having acorrespondence with the second component, the third magnetic sensorgenerates at least one third detection signal having a correspondencewith the third component, the support includes a processor, and theprocessor generates a first detection value corresponding to the firstcomponent based on the at least one first detection signal, and alsogenerates a second detection value corresponding to a component of theexternal magnetic field in a direction parallel to the reference planeand different from the first direction and a third detection valuecorresponding to a component of the external magnetic field in thedirection perpendicular to the reference plane based on the at least onesecond detection signal and the at least one third detection signal. 20.The magnetic sensor device according to claim 7, wherein the supportincludes a processor configured to perform arithmetic using a pluralityof detection signals generated by the first to third magnetic sensors.21. The magnetic sensor device according to claim 20, wherein theprocessor is constructed of an ASIC.
 22. The magnetic sensor deviceaccording to claim 20, wherein the magnetic sensor device is mounted ona printed board by the support being bonded to the printed board.
 23. Amagnetic sensor system comprising: the magnetic sensor device accordingto claim 7; and a magnetic field generator that generates apredetermined magnetic field, wherein a relative position of themagnetic field generator with respect to the magnetic sensor device ischangeable along a predetermined spherical surface.
 24. A magneticsensor device comprising: a first chip including a first magneticsensor, a second chip including a second magnetic sensor and a thirdmagnetic sensor, and a support having a reference plane, wherein thefirst magnetic sensor includes at least one first magnetic detectionelement and detects a first component of an external magnetic field, andthe first component is a component of the external magnetic field in afirst direction, the second magnetic sensor includes at least one secondmagnetic detection element and detects a second component of theexternal magnetic field, and the second component is a component of theexternal magnetic field in a second direction, the third magnetic sensorincludes at least one third magnetic detection element and detects athird component of the external magnetic field, and the third componentis a component of the external magnetic field in a third direction, thefirst direction, the second direction, and the third direction aremutually different directions, the first chip and the second chip aremounted on the reference plane, and each of the first chip and thesecond chip has a shape long in a direction orthogonal to a direction ofalignment of the first chip and the second chip, when viewed from thedirection perpendicular to the reference plane.
 25. The magnetic sensordevice according to claim 24, wherein the first chip and the second chipare disposed with a predetermined gap therebetween.
 26. The magneticsensor device according to claim 25, wherein the first chip and thesecond chip are disposed such that, when viewed from the directionperpendicular to the reference plane, a virtual straight line passingthrough the gap and having the same distance from the first chip andfrom the second chip does not cross a barycenter of the support.
 27. Themagnetic sensor device according to claim 24, wherein the first chipviewed from the direction perpendicular to the reference plane issmaller in size than the second chip viewed from the directionperpendicular to the reference plane.
 28. The magnetic sensor deviceaccording to claim 27, wherein the first chip includes a first elementarrangement area in which the at least one magnetic detection element isdisposed, the second chip includes a second element arrangement area inwhich the at least one second magnetic detection element and the atleast one third magnetic detection element are disposed, and the firstelement arrangement area is ⅔ or less of the second element arrangementarea in size.
 29. The magnetic sensor device according to claim 24,wherein each of the first chip and the second chip is disposed suchthat, when viewed from the direction perpendicular to the referenceplane, a virtual straight line passing through a barycenter of the firstchip and a barycenter of the second chip is in parallel with thedirection of alignment of the first chip and the second chip.
 30. Themagnetic sensor device according to claim 24, wherein the first chip hasa plurality of first pads disposed in a vicinity of both ends of thefirst chip in a longitudinal direction of the first chip, and the secondchip has a plurality of second pads disposed in a vicinity of both endsof the second chip in a longitudinal direction of the second chip. 31.The magnetic sensor device according to claim 24, wherein the supporthas a plurality of third pads disposed on the reference plane, part ofthe plurality of third pads is disposed on both sides of the first chipin the longitudinal direction of the first chip, and other part of theplurality of third pads is disposed on both sides of the second chip inthe longitudinal direction of the second chip.
 32. The magnetic sensordevice according to claim 24, wherein the second chip includes a secondelement arrangement area in which the at least one second magneticdetection element and the at least one third magnetic detection elementare disposed, and when viewed from the direction perpendicular to thereference plane, the second element arrangement area has a planar shapelong in a direction orthogonal to a longitudinal direction of a planarshape of the second chip.
 33. The magnetic sensor device according toclaim 24, wherein a dimension of the first chip in the directionperpendicular to the reference plane and a dimension of the second chipin the direction perpendicular to the reference plane are the same. 34.The magnetic sensor device according to claim 24, w % herein a dimensionof the support in the direction perpendicular to the reference plane islarger than a dimension of the first chip in the direction perpendicularto the reference plane and a dimension of the second chip in thedirection perpendicular to the reference plane.
 35. The magnetic sensordevice according to claim 24, wherein the first magnetic sensorgenerates at least one first detection signal having a correspondencewith the first component, the second magnetic sensor generates at leastone second detection signal having a correspondence with the secondcomponent, the third magnetic sensor generates at least one thirddetection signal having a correspondence with the third component, thesupport includes a processor, and the processor generates a firstdetection value corresponding to the first component based on the atleast one first detection signal, generates a second detection valuecorresponding to the second component based on the at least one seconddetection signal, and generates a third detection value corresponding tothe third component based on the at least one third detection signal.36. The magnetic sensor device according to claim 24, wherein thesupport includes a processor configured to perform arithmetic using aplurality of detection signals generated by the first to third magneticsensors.
 37. The magnetic sensor device according to claim 36, whereinthe processor is constructed of an ASIC.
 38. The magnetic sensor deviceaccording to claim 36, wherein the magnetic sensor device is mounted ona printed board by the support being bonded to the printed board.
 39. Amagnetic sensor system comprising: the magnetic sensor device accordingto claim 24; and a magnetic field generator that generates apredetermined magnetic field, wherein a relative position of themagnetic field generator with respect to the magnetic sensor device ischangeable along a predetermined spherical surface.